Title :
Advanced MEMS for high power integrated distribution systems
Author :
Kasim, Rahim ; Kim, Bruce C. ; Drobnik, Josef
Author_Institution :
Arizona State Univ., AZ, USA
Abstract :
This paper presents a design and fabrication of advanced MEMS in high power applications. The developed MEMS is used as a circuit breaker for high power distribution systems. We designed and fabricated MxN array of low power MEMS switches to handle high power which are mass actuated by an external magnetic field.
Keywords :
circuit breakers; microswitches; power distribution; MEMS switches; MxN array; circuit breaker; high power integrated distribution systems; magnetic field; Bridge circuits; Circuit breakers; Coils; Magnetic fields; Magnetic switching; Micromechanical devices; Microswitches; Nickel; Permanent magnets; Switches; MEMS; MEMS Circuit breaker; power distribution;
Conference_Titel :
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN :
0-7695-2398-6
DOI :
10.1109/ICMENS.2005.21
