Title :
High-aspect-ratio gold electrodes fabricated by thick-multilevel interconnection technology for electrical isolation of MEMS mirrors in wavelength-selective switches
Author :
Sakata, Tomomi ; Usui, Mitsuo ; Uchiyama, Shingo ; Shimoyama, Nobuhiro ; Kodate, Junichi ; Ishii, Hiromu ; Matsuura, Tohru ; Shimokawa, Fusao ; Sato, Yasuhiro
Author_Institution :
NTT Microsyst. Integration Labs., NTT Corp., Atsugi, Japan
Abstract :
Electrical separation-walls with a high aspect ratio are fabricated in the narrow space between mirror-drive electrodes. With these walls between adjacent channels, each MEMS mirror successfully operates with very low electrical interference.
Keywords :
gold; micro-optics; micromirrors; Au; MEMS mirrors; electrical interference; electrical isolation; electrical separation-walls; high-aspect-ratio electrodes; mirror-drive electrodes; thick-multilevel interconnection technology; wavelength-selective switches; Electrodes; Fabrication; Gold; Interference; Isolation technology; Micromechanical devices; Mirrors; Optical arrays; Optical devices; Polyimides;
Conference_Titel :
LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE
Conference_Location :
Belek-Antalya
Print_ISBN :
978-1-4244-3680-4
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2009.5343121
