An Investigation of Femtosecond Laser Micromachining

Femtosecond laser micromachining is a new approach emerging in MEMS area in recent years. Although some applications have been reported, this technology is still not matured and not understood very well. Femtosecond lasers currently show much promise as potential effective tools in micromachining or micro-system applications, which include industrial material processing, biomedicine, photonics and semiconductors. In this paper, the status of micromachining with femtosecond pulses is reviewed. Some of advantages and applications are presented. Finally, we propose a "free force" 3D micromachining concept using laser including femtosecond laser to create micro and nanostructures.