Differential reflection characteristics for optical probing of nanoscale anisotropic layered system

The reflection of linearly polarized light from an N-layer system of nanometer-size anisotropic insulating films is investigated. The approximate expressions for reflection characteristics are derived. All analytical results are supported by computer-aided analysis made on the basis of general wave propagation theory for anisotropic layered media. It is show that the accuracy of the long-wavelength approximation for nanoscopic anisotropic layered systems is quite satisfactory: if the thickness of a multilayer divided by the wavelength comprises only a few hundredths, then the error of approximate expressions will be of the order of several percent. The most useful feature of obtained formulas is that they are simply invertible, allowing a direct calculation of the parameters of nanoscale layers.