MEMS accelerometer with two thin film piezoelectric read-out

MEMS accelerometer using piezoelectric lead zirconate titanate (PZT) thin films as readout have been attracted a great attention due to their simple structures and high sensitivity. This paper proposed a model of microaccelerometer with two suspended flexural PZT-on-silicon beams and a central proof mass configuration. The geometry and elastic properties of the thin films have been taken into account when formulating the acceleration-equation. To verify which vibration mode is the dominate one on the acceleration, mode analysis has been carried out by using MEMS software: CoventorWare. The analytical equation between charge and acceleration has been derived, which provides an opportunity to design the accelerometer. The research shown the proposed accelerometer is simple to manufacturing, liable, for large g conditions and wide frequency response.