Low-power micromachined microsystems

Author

Najafi, Khalil

Author_Institution

Center for Integrated MicroSyst., Michigan Univ., Ann Arbor, MI, USA

fYear

2000

fDate

2000

Firstpage

1

Lastpage

8

Abstract

Micromachined microsystems and micro electromechanical systems (MEMS) have made possible the development of highly accurate and portable sensors and instruments for a variety of applications in health care, industrial, consumer products, avionics, and defense. Design of low-power circuits for these applications, and use of micromachined sensors and actuators in combination with integrated circuits to implement even lower power microinstruments has now become possible and the focus of attention. This paper reviews the state of the art in the development of micromachined microsystems and MEMS, discusses low-power design approaches for microsystems, and reviews some recent development in power generation and energy harvesting from the environment.

Keywords

low-power electronics; micromachining; micromechanical devices; energy harvesting; low-power micromachined microsystems; micro electromechanical systems; microinstruments; micromachined sensors; power generation; Aerospace electronics; Circuits; Consumer products; Defense industry; Electromechanical sensors; Electromechanical systems; Instruments; Medical services; Micromechanical devices; Sensor systems and applications;

fLanguage

English

Publisher

ieee

Conference_Titel

Low Power Electronics and Design, 2000. ISLPED '00. Proceedings of the 2000 International Symposium on

Print_ISBN

1-58113-190-9

Type

conf

DOI

10.1109/LPE.2000.155244

Filename

876748