Title :
RF MEMs tunable inductor using bimorph microactuators
Author :
Zine-El-Abidine, Imed ; Okoniewski, Michal ; McRory, John G.
Abstract :
Inductors play an important role in wireless front-end circuitry. Tunable inductors can provide more flexibility in optimizing RF devices such as filters and VCOs. A tunable inductor using a process fully compatible with CMOS has been constructed. The tuning range achieved was 30%.
Keywords :
inductors; microactuators; radiofrequency filters; radiofrequency oscillators; CMOS; RF MEMs tunable inductor; RF devices; bimorph microactuators; filters; micromachining; microwave circuits; tunable circuits; tuning range; wireless front-end circuitry; Actuators; Coils; Inductance; Inductors; Microactuators; Micromachining; Radio frequency; Radiofrequency microelectromechanical systems; Tunable circuits and devices; Tuning;
Conference_Titel :
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN :
0-7695-2398-6
DOI :
10.1109/ICMENS.2005.105
