A study on the effects of humidity, temperature, and pressure sensor on the piezoresistive film co-structure

Author

Chao, Lu-Ping ; Lin, Chih-Wei ; Lau, Yung-Dong

Author_Institution

Dept. of Mech. & Comput. Aided Eng., Feng Chia Univ., Taichung, Taiwan

fYear

2005

fDate

24-27 July 2005

Firstpage

443

Lastpage

446

Abstract

The purpose of this paper is to analyze a polyimide-based co-structure membrane sensor, especially the effect of temperature, humidity and pressure on the sensor. Following the membrane theory, the finite element model constructed by the software ANSYS was employed to simulate different payloads. In order to determine the significance levels of different payloads, the Pearson linear correlation coefficient (PLCC) of the data resulting from the Monte Carlo simulation method was calculated.

Keywords

Monte Carlo methods; finite element analysis; humidity sensors; membrane theory; piezoresistive devices; pressure sensors; temperature sensors; Monte Carlo simulation; Pearson linear correlation coefficient; finite element model; humidity sensor; membrane theory; piezoresistive film costructure; polyimide-based costructure membrane sensor; pressure sensor; software ANSYS; temperature sensor; Biomedical engineering; Biomembranes; Computer aided engineering; Finite element methods; Humidity; Payloads; Piezoresistance; Solid modeling; Temperature distribution; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on

Print_ISBN

0-7695-2398-6

Type

conf

DOI

10.1109/ICMENS.2005.19

Filename

1540873