Hysteresis spring single digital input bistable mechanism

This paper presents the first reported microfabricated single digital input bistable MEMS mechanism. The bistable mechanism is an important building block for many MEMS. Applications of bistable mechanisms include optical switches, microrelays and motor transmissions. Current literature contains examples of dual digital input and single analog input bistable mechanisms; however, no single digital input bistable mechanisms have yet been reported. This work develops the hysteresis spring as an enabling mechanism to allow the creation of the first reported single digital input bistable mechanism. The functionality of the hysteresis spring single digital input bistable mechanism is described and an analytical model is developed. The analytical model is shown to agree with experimental results. The proof of concept design has been fabricated and the prescribed functionality has been shown experimentally.