Title :
Compact demultiplexer using cascaded planar concave grating and ring resonators on SOI
Author :
Yurtsever, Gunay ; Brouckaert, Joost ; Bogaerts, Wim ; Dumon, Pieter ; Van Thourhout, Dries ; Baets, Roel
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Ghent, Belgium
Abstract :
We present a compact demultiplexer based on cascaded planar concave grating and ring resonators. The demultiplexer has 28 channels, with 1 nm channel spacing. The device was fabricated on a silicon-on-insulator (SOI) platform using CMOS compatible deep UV lithography. The size of the structure is 1.5 times 3 mm. Insertion loss is 15 dB, channel to channel variation is 5 dB.
Keywords :
CMOS integrated circuits; demultiplexing equipment; diffraction gratings; integrated optoelectronics; silicon-on-insulator; ultraviolet lithography; CMOS process; cascaded planar concave grating; channel spacing; deep ultraviolet lithography; demultiplexers; ring resonators; silicon-on-insulator; Arrayed waveguide gratings; Bandwidth; Channel spacing; Etching; Fabrication; Lithography; Optical ring resonators; Optical waveguides; Photonics; Silicon on insulator technology;
Conference_Titel :
LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE
Conference_Location :
Belek-Antalya
Print_ISBN :
978-1-4244-3680-4
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2009.5343160
