A bistable shape memory microvalve for three-way control

Author

Megnin, C. ; Barth, J. ; Kohl, M.

Author_Institution

Inst. of Microstructure Technol. (IMT, Karlsruhe Inst. of Technol. (KIT), Karlsruhe, Germany

fYear

2011

fDate

5-9 June 2011

Firstpage

1308

Lastpage

1311

Abstract

This paper reports on the design, fabrication and performance of a novel bistable three-way shape memory microvalve for diverting and mixing applications. A symmetric arrangement of two counteracting shape memory alloy (SMA) microbridges is used for switching. Magnetic microstructures provide magneto-static contact forces in power-off condition allowing for stable open and closed states. A detailed design study on the geometry of magnetic microstructures and of spacer layers is performed to meet the requirements of large pressure range and identical flow performance in the outlet ports. The overall dimensions of first demonstrators are 11×6×4 mm³. Bistable operation is shown for a differential pressure up to 300 kPa at flow rates of 2200 sccm (N₂).

Keywords

flow control; microfabrication; microvalves; SMA microbridge; bistable three-way shape memory microvalve; magnetic microstructure geometry; magneto-static contact force; shape memory alloy microbridge; three-way flow control; Force; Layout; Magnetic switching; Microvalves; Shape; Switches; SMA actuation; bistable switching; microvalve; three-way flow control;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969420

Filename

5969420