• DocumentCode
    2534213
  • Title

    The nanostructured OrigamiTM 3D fabrication and assembly process for nanomanufacturing

  • Author

    In, Hyun Jin ; Arora, Will ; Buchner, Tilman ; Jurga, Stanley M. ; Smith, H. Enry I ; Barbastathis, George

  • Author_Institution
    Dept. of Mech. Eng., Massachusetts Inst. of Technol., Cambridge, MA, USA
  • fYear
    2004
  • fDate
    16-19 Aug. 2004
  • Firstpage
    358
  • Lastpage
    360
  • Abstract
    Nanostructured OrigamiTM 3D fabrication and assembly process is a method of manufacturing 3D nanosystems using exclusively 2D litho tools. The 3D structure is obtained by folding a nanopatterned 2D substrate. We report on the materials, actuation, and modeling aspects of the manufacturing process, and present experimental results from fabricated structures.
  • Keywords
    microassembling; nanopatterning; nanostructured materials; photolithography; 2D litho tools; 3D nanosystem manufacturing; 3D structure; Si; assembly process; nanopatterned 2D substrate; nanostructured OrigamiTM 3D fabrication; Assembly; Biomembranes; Electron beams; Energy storage; Fabrication; Fasteners; Lithography; Manufacturing processes; Nanostructured materials; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2004. 4th IEEE Conference on
  • Print_ISBN
    0-7803-8536-5
  • Type

    conf

  • DOI
    10.1109/NANO.2004.1392350
  • Filename
    1392350
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2534213