Fabrication of high aspect ratio carbon nanotube-carbon composite microstructures based on silicon molding technique

Author

He, Liang ; Toda, Masaya ; Kawai, Yusuke ; Miyashita, Hidetoshi ; Shao, Chuanyu ; Omori, Mamoru ; Hashida, Toshiyuki ; Ono, Takahito

Author_Institution

Dept. of Mech. Syst. & Design, Tohoku Univ., Sendai, Japan

fYear

2011

fDate

5-9 June 2011

Firstpage

2331

Lastpage

2334

Abstract

This paper reports the fabrication and characterization of carbon nanotube (CNT)/carbon composite microstructures with higher Young´s modulus than that of pyrolysis carbon. Hybrid microstructures consisted of CNT composite and Si are successfully fabricated by micromolding and pyrolysis of a resist (SU-8) mixed with CNTs. The photoresist mixed with CNTs is filled into a Si micromold fabricated by deep reactive ion etching (deep RIE), then the CNT/resist is converted to CNT/carbon microstructures using two-step high temperature pyrolysis process in an inert gas. Then, the Si substrate is patterned by deep RIE. The maximum aspect ratio of the composite structures is approximately 40.

Keywords

Young´s modulus; carbon nanotubes; microfabrication; moulding; nanocomposites; nanofabrication; nanopatterning; photoresists; pyrolysis; sputter etching; C-C; CNT; Si; Young´s modulus; carbon composite microstructures; carbon nanotube; fabrication; micromolding; photoresist; pyrolysis; reactive ion etching; Carbon; Carbon nanotubes; Fabrication; Microstructure; Resists; Silicon; Young´s modulus; Carbon nanotube; Composite microstructures; Deep reactive ion etching; Pyrolysis carbon; Silicon molding;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969549

Filename

5969549