Fabrication and testing of CVD diamond single-material MEMS resonators with piezoresistive detection

Author

Cao, Zongliang ; Aslam, Dean M.

Author_Institution

Dept. of Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI, USA

fYear

2011

fDate

5-9 June 2011

Firstpage

2359

Lastpage

2361

Abstract

Using piezoresistive detection and piezoelectric actuation, the fabrication and testing of polycrystalline diamond based single-material MEMS (SMM) resonators, with a resonant frequency of 48.2 KHz and a quality factor of 160 in air, is reported for the first time. A 0.6-μm-thick boron-doped poly-C with a resistivity of 9 Ω·cm is used as a piezoresistor. A 50-nm-thick highly-doped poly-C inter-layer, with a resistivity of 5×10^-3 Ω·cm, was used between the metal and the piezoresistor to reduce the contact resistance. A 3-μm-thick undoped poly-C film, with a resistivity >; 10⁹ Ω·cm, was used as an insulating as well as a structural material.

Keywords

chemical vapour deposition; materials testing; microfabrication; micromechanical resonators; piezoresistive devices; CVD diamond single-material mems resonators; frequency 48.2 kHz; piezoelectric actuation; piezoresistive detection; polycrystalline diamond based SMM resonators; polycrystalline diamond based single-material resonators; size 0.6 mum; size 3 mum; size 50 nm; Conductivity; Diamond-like carbon; Etching; Fabrication; Micromechanical devices; Piezoresistance; Silicon; diamond; piezoresistive; resonator;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969558

Filename

5969558