Design evaluation of shock induced failure mechanisms of MEMS by correlation of numerical and experimental results

The paper presents a novel approach to evaluate and improve MEMS reliability even during design phase of new devices. Firstly, the shock induced failure mechanisms of breakage and stiction are characterized by test structures. The obtained results in terms of maximum rated loads are compared to acting loads during the actual mechanical shock, which are calculated by a numerical impact model. The model is based on the modal superposition approach and can be applied to arbitrary designs. It accounts for impacts at flexible travel stops including stiction as well as for large structural deflections leading to strongly nonlinear squeeze damping.