• DocumentCode
    2535984
  • Title

    Imaging interferometric microscopy- resolution to the linear systems limits

  • Author

    Brueck, S.R.J.

  • Author_Institution
    Depts. of Phys. & Electr. & Comput. Eng., Univ. of New Mexico, Albuquerque, NM, USA
  • fYear
    2009
  • fDate
    4-8 Oct. 2009
  • Firstpage
    238
  • Lastpage
    239
  • Abstract
    Imaging interferometric microscopy resolution to lambda/2(nsub+1) (nsub = substrate refractive index) is demonstrated using evanescent-wave illumination. Resolution to 150 nm (lambda/4.2) is achieved using a 633 nm source and a 0.4 NA lens.
  • Keywords
    fibre optic sensors; image resolution; interferometry; optical microscopy; evanescent-wave illumination; imaging interferometric microscopy; linear systems limits; Frequency; High-resolution imaging; Image reconstruction; Image resolution; Lighting; Linear systems; Optical microscopy; Optical scattering; Optical surface waves; Scanning electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE
  • Conference_Location
    Belek-Antalya
  • ISSN
    1092-8081
  • Print_ISBN
    978-1-4244-3680-4
  • Electronic_ISBN
    1092-8081
  • Type

    conf

  • DOI
    10.1109/LEOS.2009.5343293
  • Filename
    5343293
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2535984