DocumentCode
2536195
Title
Nonlinear air drag damping of torsional microscanners
Author
Davis, W.O.
Author_Institution
MicroVision, Inc., Redmond, WA, USA
fYear
2011
fDate
5-9 June 2011
Firstpage
1424
Lastpage
1427
Abstract
An empirical model is described for the air drag damping of resonant torsional microscanners. Experimentally determined drag coefficients are presented for four scanning mirror designs, and comparisons between the designs suggest that a simple empirical model for the damping of such devices can be predictive.
Keywords
damping; micromirrors; optical scanners; drag coefficients; nonlinear air drag damping; scanning mirror; torsional microscanners; Atmospheric modeling; Damping; Drag; Frequency measurement; Micromechanical devices; Mirrors; Q measurement; MEMS scanning mirror; Nonlinear damping; drag coefficient; quality factor;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969585
Filename
5969585
Link To Document