Title :
Investigation of temporary stiction in poly-SiGe micromirror arrays
Author :
Ling, F.Z. ; De Coster, J. ; Lin, W.Y. ; Witvrouw, A. ; Celis, J.-P. ; De Wolf, I.
Author_Institution :
Imec, Leuven, Belgium
Abstract :
Stiction is one of the most important concerns in micro-electro-mechanical systems (MEMS) reliability. In this paper, we present an investigation on stiction of standard poly-SiGe MEMS. A FDTS self-assembled monolayer (SAM) is applied to reduce this in-use stiction. The impact of the relative humidity and of a vacuum thermal treatment to stiction was studied in an environmentally controlled chamber.
Keywords :
Ge-Si alloys; micromechanical devices; micromirrors; monolayers; polymers; reliability; self-assembly; stiction; FDTS SAM; FDTS self-assembled monolayer; MEMS reliability; SiGe; microelectromechanical systems reliability; micromirror arrays; temporary stiction investigation; vacuum thermal treatment; Coatings; Electrodes; Force; Micromechanical devices; Micromirrors; Surface roughness; MEMS; micromirror; reliability; stiction;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969591
