Author_Institution :
Grad. Sch. of Inf. & Commun. Eng., Inha Univ., Incheon, South Korea
Abstract :
This paper presents an overview of our work on the design, fabrication, and integration of micro/nano-scale optical devices for VLSI photonic integration and sensor applications. The micro/nano-optical devices are designed to perform the functions of sensing and other functions such as switching, routing, and distributing optical signals on a chip scale or a board-scale. The integrated optical components include micro/nano-scale optical waveguides, switches, sensors, couplers, and multi-mode interference devices, constructed of building blocks such as nano-wires, micro-ring resonators, photonic crystals, and plasmonics made of polymer, silicon and semiconductor materials. The paper reports on some of the progresses and discusses the scientific and technological issues thereof.
Keywords :
integrated optics; micro-optics; microsensors; nanophotonics; nanosensors; optical sensors; photonic crystals; plasmonics; VLSI photonics; integrated optical component; micro-scale optical device; nano-scale optical device; optical signal; photonic crystals; plasmonic wire; sensor application; Nanoscale devices; Optical devices; Optical polymers; Optical resonators; Optical sensors; Optoelectronic and photonic sensors; Photonic crystals; Plasmons; Very large scale integration; Wires; microphotonics; nanophotonics; optical sensor; photonic circuits; photonic integration;