Design and characterization of a low-voltage piezoelectrically actuated polymer membrane

This publication presents the design, fabrication and characterization of a novel piezo-polymer technology, as a main building block for polymer-based MEMS actuators and devices. A high-precision hot embossing process has been developed to fabricate mechanically robust polycarbonate membranes, with a high flatness, large size and small, precise adjustable thickness. The mounting of a low-voltage multilayer piezoactuator was performed with an optimized gluing process to provide a thin interface layer with a high mechanical strength. By applying a voltage of 40 V to the actuator, displacements up to 18 μm were achieved without fatigue after 10 000 cycles. Up to an isostatic pressure of 50 kPa the membrane shows a linear mechanical deflection without any mechanical hysteresis or bulging.