Nano-opto-mechanical linear actuator utilizing gradient optical force

This work presents an opto-mechanical linear actuator utilizing the gradient optical force between two identical parallel waveguides. The actuator size shrinks to nanoscale dimensions. Theoretical study shows that the actuator deflection is controlled over optical signals and linearly proportional to the applied optical power. Such optical actuator takes full advantages of the nanotechnology, and has many advantages over their electrostatic comb-drive counterparts, most importantly immunity to electromagnetic interference and mechanical shock, and avoiding the problem of side instability.