Development of the micro-mirror with large scaning angle using FE-based metallic glass thin film

In order to realize the large tilting angle of micro-mirror devices without mechanical failure, the mirror structure was fabricated using a Fe-based metallic glass (MG) thin film. The micro-mirrors with mirror-plate diameter of 900μm and torsion bar dimensions; length 250μm, width 30μm and thickness 3μm were fabricated. Extremely large tilting angle of ± 270° was obtained on activation of mirror by using a permanent magnet. And when 93mA was applied to the driving set-up using Lorentz force, over 75° of mechanical angle was obtained. Large tilting angle of micro-mirror is due to the torsion bar which was fabricated with Fe-based MG thin film that has large elastic strain limit, excellent magnetic and mechanical properties.