• DocumentCode
    2536944
  • Title

    Characterization of the 2nd generation magnetic microbearing with integrated stabilization for frictionless devices

  • Author

    Badilita, V. ; Rzesnik, S. ; Kratt, K. ; Wallrabe, U.

  • Author_Institution
    Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
  • fYear
    2011
  • fDate
    5-9 June 2011
  • Firstpage
    1456
  • Lastpage
    1459
  • Abstract
    We present for the first time a full characterization of a microbearing based on stabilized magnetic levitation. The device consists of two coaxial wirebonded solenoidal microcoils (2000 μm and 3600 μm diameter) for levitation and stabilization purposes respectively. We demonstrate controlled vertical positioning of an Al plate (25 μm thick, 3200 μm diameter) ranging up to 150 μm at an excitation signal with frequency f = 2 MHz and 105 mA effective current in the levitation microcoil. The positioning error is 2.6 μm.
  • Keywords
    aluminium; machine bearings; magnetic levitation; micromechanical devices; solenoids; 2nd generation magnetic microbearing; Al; coaxial wirebonded solenoidal microcoils; controlled vertical positioning; excitation signal; frictionless devices; integrated stabilization; magnetic levitation; size 150 mum; size 25 mum; size 3200 mum; Coils; Fabrication; Facsimile; Laboratories; Levitation; Microactuators; Windings; Magnetic microbearing; levitation; microcoil;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
  • Conference_Location
    Beijing
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-0157-3
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2011.5969624
  • Filename
    5969624
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2536944