Nano-electromechanical storage element for a low power complimentary logic architecture using PZT relays

A mechanical dynamic latching element has been developed within a novel, low power piezoelectric MEMS digital architecture. The latch, which has demonstrated reliable and repeatable operation over multiple cycles, consumes only 2.2 pW of leakage power and 0.18 nJ of dynamic energy while utilizing no additional transistor components.