A functional microprobe integrated with sharp tip and huge deflection crank-slider structural cantilever for versatile instrument

The paper reports a microcantilever-based microprobe that will be applied at a versatile instrument in combination of atomic force microscopy with mass spectrometry. Due to the special requirements for the microprobe, the probe is expected to equip with an in-plane sharp tip for high-resolution image scanning and easy sample electrical extraction, as well as a self-actuated cantilever that owns huge deflection in order to freely switch between two terminals. Therefore, a new concept of new actuation and vibrating mode for cantilevers is presented, where a crank-slider structural cantilever connected to integrated in-plane actuators and a sharp tip are monolithically constructed, serving as a functional microprobe. A newly wet and dry etching hybrid method is introduced to easily fabricate the sharp tip with various aspect ratios. To get big out-of-plane deflection of cantilever, optimized design has been considered and carefully calculated, finally proved by experimental results.