Efficient electrostatic inchworm motors with simple control and high force density

A novel high force density electrostatic inchworm motor with angled flexible drive arms has been developed, manufactured and tested. The flexible arm converts transverse movement of the gap closing actuators into longitudinal movement of the shuttle. This design reduces the footprint of the entire motor, simplifies the actuation control, and increases shuttle speed along with motor efficiency. The new motor achieved blocking forces of 0.7 mN at 110 V, reached speeds up to 3.6 mm/sec, and demonstrated efficiency of 17% from electrical input power to mechanical output power.