DocumentCode :
2538100
Title :
Millimeter-wave filter using novel micromachined substrate integrated waveguide structure with embedded silicon vias in BCB dilectrics
Author :
Hyeon, Ik-Jae ; Park, Woo-Young ; Lim, Sungjoon ; Baek, Chang-Wook
Author_Institution :
Sch. of Electr. & Electron. Eng., Chung-Ang Univ. (CAU), Seoul, South Korea
fYear :
2011
fDate :
5-9 June 2011
Firstpage :
2482
Lastpage :
2485
Abstract :
This paper reports a millimeter-wave bandpass filter (BPF) based on a novel micromachined substrate integrated waveguide (SIW) structure with square complementary split-ring resonators (CSRRs). Four CSRRs are introduced to the SIW as an element providing passband characteristics below a cutoff frequency of the waveguide required for BPF. Unlike usual SIW-BPFs, the proposed BPF can be integrated with silicon-based circuits or RF MEMS devices by micromachining batch process due to its silicon process compatibility. In order to change the propagation mode from TEM to TE10, triangular slots are utilized as a CPW to waveguide transition. The fabricated BPF shows a high selectivity with a minimum insertion loss of 2.27 dB at 14 GHz and a 3-dB bandwidth of 9.3 %. These measured results are in good agreement with the simulation results.
Keywords :
band-pass filters; integrated optoelectronics; millimetre wave filters; optical waveguides; radiofrequency integrated circuits; silicon compounds; BCB dilectrics; RF MEMS devices; SIW; embedded silicon; frequency 14 GHz; integrated waveguide structure; micromachined substrate; millimeter wave bandpass filter; propagation mode; split ring resonators; triangular slots; waveguide transition; Band pass filters; Fabrication; Microwave filters; Radio frequency; Resonator filters; Silicon; Substrates; Substrate integrated waveguide (SIW); bandpass filter (BPF); complementary split-ring resonators (CSRRs); micromachining process;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
ISSN :
Pending
Print_ISBN :
978-1-4577-0157-3
Type :
conf
DOI :
10.1109/TRANSDUCERS.2011.5969698
Filename :
5969698
Link To Document :
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