Title :
A Nano-opto-mechanical pressure sensor
Author :
Zhao, X. ; Tsai, J.M. ; Cai, H. ; Ji, X.M. ; Zhou, J. ; Bao, M.H. ; Huang, Y.P. ; Kwang, D.L. ; Liu, A.Q.
Author_Institution :
Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore
Abstract :
A Nano-opto-mechanical pressure sensor using optical force is reported in this paper. The pressure sensor consists of a square diaphragm, a ring resonator and four waveguides. By applying a pressure ranging from 900 kPa to 990 kPa, the output intensity ratio sensitivity of -2.272 /kPa is achieved. Compared with traditional MEMS pressure sensor, the proposed ring pressure sensor has advantages such as higher sensitivity and resolution, which could be applied to acoustic pressure sensors and microphones etc.
Keywords :
nanophotonics; nanosensors; pressure sensors; MEMS pressure sensor; microphones; nanooptomechanical pressure sensor; optical force; pressure 900 kPa to 990 kPa; ring resonator; square diaphragm; Facsimile; Optical ring resonators; Nano-opto-mechanical systems (NOMS); optical force; ring resonator;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969721
