Title :
Continuous membrane deformable mirror for adaptive optics using bimorph spring
Author :
Wu, T. ; Akiyama, M. ; Hane, K.
Author_Institution :
Dept. of Nanomech., Tohoku Univ., Sendai, Japan
Abstract :
We propose, design and fabricate here a novel electrostatically actuated continuous membrane deformable mirror for the next generation astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A 3.4mm × 3.4 mm deformable mirror with a underlying 4×4 electrode array is fabricated by utilizing plasma activated bonding and the subsequent all-dry release process. The fabricated deformable mirror deformed 3.8μm at 130V.
Keywords :
adaptive optics; electrostatic actuators; mirrors; adaptive optics; air gap; all-dry release process; bimorph spring; continuous membrane deformable mirror; electrode array; next generation astronomical observation; plasma activated bonding; size 3.8 mum; voltage 130 V; Arrays; Bonding; Electrodes; Mirrors; Silicon; Springs; Stress; Deformable mirror; adaptive optics;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969726
