Title :
Multifunctional optical MEMS sensor platform for wireless optical sensor networks
Author :
Pang, C. ; Yu, M. ; Zhang, X.M. ; Gupta, A.K. ; Bryden, K.M.
Author_Institution :
Dept. of Mech. Eng., Univ. of Maryland, College Park, MD, USA
Abstract :
This paper reports a multifunctional optical sensor platform based on the microelectromechanical systems (MEMS) technology with the aim to miniaturize conventional bulky optical measurement systems for space-constrained applications and harsh environment. Small discrete optical components are integrated onto a printed circuit board by using optical fibers as the waveguide. Low-coherence interferometry is used for modulation and retrieval of the sensing signal. The whole optical system including the related circuit takes up a footprint of 2.2" × 1.5". To test the functionality, a fiber-tip pressure sensor is interrogated using this platform. The successful demonstration suggests that this platform can be used for optical measurement in the sensor node of Wireless Sensor Networks (WSNs).
Keywords :
detector circuits; fibre optic sensors; integrated optoelectronics; light interferometry; micro-optomechanical devices; microsensors; pressure sensors; printed circuits; wireless sensor networks; bulky optical measurement systems; fiber tip pressure sensor; harsh environment; low-coherence interferometry; microelectromechanical systems; multifunctional optical MEMS sensor; multifunctional optical sensor; optical fibers waveguide; printed circuit board; small discrete optical components; space constrained applications; wireless optical sensor networks; Micromechanical devices; Optical fiber sensors; Optical fibers; Optical filters; Wireless sensor networks; Optical integration; low coherence interferometry; optical sensors; wireless sensor network;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969739
