1-D electro-optic beam steering device

In this paper, we present the design and fabrication of a 1D beam steering device based on a planar electro-optic thermal-plastic prisms and a collimator lens array. With the elimination of moving parts, the proposed device is able to resolve the mechanical limitations of present scanning devices, such as fatigue and low operating frequency, while maintaining a small system footprint (~0.5mm×0.5mm). Simulation and fabrication process of the device is presented. Device operation is observed and measured. From experiment, our prototype device is able to achieve a maximum deflection angle of 5.6° and a a 4μm collimated beam diameter.