Determination of parameters of thin semiconductor layers by means of one-dimensional microwave photonic crystals

Author

Ponomarev, D.V. ; Nikitov, S.A. ; Usanov, D.A. ; Skripal, A.V. ; Postelga, A.E.

Author_Institution

Solid State Phys. Dept., Saratov State Univ. named after N.G. Chernyshevsky, Saratov, Russia

Volume

2

fYear

2012

fDate

21-23 May 2012

Firstpage

789

Lastpage

793

Abstract

The possibility to simultaneously determine the thickness and the electrical conductivity of thin semiconductor layer, which play a role of the irregularity in one-dimensional waveguide photonic crystals, using the results of measurement of reflection and transmission spectra in microwave band has been shown. The results of computer modeling and the inverse problem solving are presented.

Keywords

electrical conductivity measurement; inverse problems; microwave photonics; optical variables measurement; photonic crystals; semiconductor thin films; thickness measurement; 1D microwave photonic crystal; electrical conductivity measurement; inverse problem solving; reflection measurement; thickness measurement; thin semiconductor layer; transmission spectra measurement; Decision support systems; Hafnium; Microwave photonic crystal; electrical conductivity; measurement; semiconductor layer; thickness;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Radar and Wireless Communications (MIKON), 2012 19th International Conference on

Conference_Location

Warsaw

Print_ISBN

978-1-4577-1435-1

Type

conf

DOI

10.1109/MIKON.2012.6233624

Filename

6233624