Technology and characteristics of microhumidity sensors

Author

Krutovertsev, S.A. ; Tarasova, A.E. ; Krutovertseva, L.S. ; Chuprin, M.V. ; Ivanova, O.M. ; Sazhinev, Yu.S.

Author_Institution

JSC Ecological Sensors & Syst., Moscow, Russia

fYear

2011

fDate

5-9 June 2011

Firstpage

621

Lastpage

624

Abstract

Operation principle of the microhumidity sensors is based on a relationship between a capacity of doped silica film and an amount of humidity that sorbed by it. Characteristics of the films that were produced by a hydrolytic polycondensation from tetraethylorthosilicate based solutions were studied. Influence of technological factors on formation and sensitivity of the films was determined. High sensitivity enables to use the sensors to measure humidity content for especially pure gases, used in microelectronic technology, active gases at humidity content up to 193 K by dew point and organic solvents.

Keywords

humidity measurement; humidity sensors; microsensors; silicon; doped silica film; humidity content measurement; hydrolytic polycondensation; microelectronic technology; microhumidity sensors; organic solvents; tetraethylorthosilicate; Additives; Films; Humidity; Surface treatment; Temperature measurement; Temperature sensors; Silica; humidity sensor; sol-gel; thin film;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969782

Filename

5969782