Silicon carbide (SiC) membrane nanomechanical resonators with multiple vibrational modes

Author

Barnes, A.C. ; Roberts, R.C. ; Tien, N.C. ; Zorman, C.A. ; Feng, Philip X -L

Author_Institution

Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA

fYear

2011

fDate

5-9 June 2011

Firstpage

2614

Lastpage

2617

Abstract

We report on experimental demonstration of a new type of nanomechanical resonators based on very thin silicon carbide (SiC) square membranes. An optical interferometry with a radio-frequency two-port measurement scheme enables sensitive and efficient detection of many vibrational modes of the membranes. Membranes with sizes up to 1mm × 1mm and thicknesses down to t ≤ 500nm, offer very high aspect ratios and compelling resonance spectra of multiple-mode operations from kHz range to the HF (3-30MHz) band. Typical resonances have Q´s ~ 800-30000 at room temperature and in vacuum of ~20mTorr. Some high-Q modes exhibit fairly strong nonlinear effects.

Keywords

light interferometry; micromechanical resonators; nanoelectromechanical devices; silicon compounds; vibrational modes; wide band gap semiconductors; SiC; frequency 3 MHz to 30 MHz; nanomechanical resonator; nonlinear effect; optical interferometry; radiofrequency two port measurement; square membrane; temperature 293 K to 298 K; vibrational modes; Frequency measurement; Nanobioscience; Optical resonators; Q measurement; Resonant frequency; Silicon carbide; Voltage measurement; Membrane; Nanoelectromechanical Systems; Resonator; Silicon Carbide (SiC); Vibrational Modes;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969837

Filename

5969837