Title :
Vibration-driven MEMS energy harvester with vacuum UV-charged vertical electrets
Author :
Yamashita, K. ; Honzumi, M. ; Hagiwara, K. ; Iguchi, Y. ; Suzuki, Y.
Author_Institution :
Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan
Abstract :
Our target is to realize a vibration-driven MEMS generator with vertical electrets for energy harvesting applications. With the aid of a novel high-speed charging method using vacuum UV irradiation, we have realized vertical electrets on the sidewall of comb fingers. An early prototype of in-plane electret generator with parylene electrets has been successfully microfabricated through a single-wafer approach. Uniform surface potential on the vertical electrets of the comb fingers is confirmed with a Kelvin force microscopy (KFM) measurement. Power generation with the prototype has been also demonstrated.
Keywords :
electrets; energy harvesting; micromechanical devices; vibrations; Kelvin force microscopy measurement; comb fingers; high speed charging method; microfabrication; parylene electrets; power generation; single wafer approach; uniform surface potential; vacuum UV charged vertical electrets; vacuum UV irradiation; vibration driven MEMS energy harvester; vibration driven MEMS generator; Electrets; Electric potential; Fingers; Generators; Micromechanical devices; Power generation; Radiation effects; KFM; MEMS generator; Parylene; Vacuum UV; Vertical electrets;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969870
