DocumentCode
2541156
Title
Electret based energy harvester using a shared si electrode
Author
Fujii, K. ; Toyonaga, T. ; Fujita, T. ; Jiang, Y.G. ; Higuchi, K. ; Maenaka, K.
Author_Institution
Univ. of Hyogo, Himeji, Japan
fYear
2011
fDate
5-9 June 2011
Firstpage
2634
Lastpage
2637
Abstract
In this study, an electret based energy harvester with a single silicon structure that shares harvesting counter electrodes and charging grid is demonstrated. The shared electrode provide the batch fabrication process that can avoid the charge leakage from the charged electret. The mass structure supported by the thin Si spring has resonant frequency of 40 Hz. The harvesting demonstration showed the 0.23 μW at 10 Hz, 0.1 G with load resistance of 1 MΩ.
Keywords
electrets; electric resistance; electrodes; elemental semiconductors; energy harvesting; silicon; batch fabrication process; charging grid; electret based energy harvester; frequency 10 Hz; resistance 1 Mohm; shared silicon electrode; single silicon structure; thin silicon spring; Electrets; Electrodes; Fabrication; Resonant frequency; Silicon; Springs; Vibrations; Electret; Energy harvesting; Si grid electrode;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969871
Filename
5969871
Link To Document