DocumentCode :
2541198
Title :
Fabrication of highly dielectric nano-BaTiO3/epoxy-resin composite plate having trenches by mold casting and its application to capacitive energy harvesting
Author :
Suzuki, M. ; Matsushita, N. ; Hirata, T. ; Yoneya, R. ; Onishi, J. ; Wada, T. ; Takahashi, T. ; Nishida, T. ; Yoshikawa, Y. ; Aoyagi, Shigehisa
Author_Institution :
Kansai Univ., Suita, Japan
fYear :
2011
fDate :
5-9 June 2011
Firstpage :
2642
Lastpage :
2645
Abstract :
We propose a fabrication method of dielectric plate having trenches, in which a composite material of nano-BaTiO3 particles and epoxy-resin is casted into a mold of patterned thick photosensitive dry film. The features are, 1) the relative dielectric constant εr is a dozen, which is no less than those of other polymer-based ferroelectric such as poly-vinylidene-difluoride (PVDF), 2) fabrication is compatible to MEMS process, i.e., the size and pattern of trenches are flexibly designed as far as photolithographic resolution admits, 3) trench depth is several tens micron thanks to thick film resist. We applied it to an electret energy harvesting device based on fringe electrical field change inside trenched ferroelectric.The experimental output power of 2.9 nW was achieved for 80 Hz/80 μm forced vibration.
Keywords :
barium compounds; energy harvesting; microfabrication; micromechanical devices; nanocomposites; permittivity; resins; BaTiO3; MEMS process; PVDF; composite material; dielectric constant; fabrication method; fringe electrical field; high dielectric nanoepoxy-resin composite plate; photolithographic resolution; photosensitive dry film; poly-vinylidene-difluoride; power 2.9 nW; Electrets; Electrodes; Energy harvesting; Fabrication; Films; Micromechanical devices; Substrates; BaTiO3; CYTOP; Electret; Energy harvesting; Nano composite;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
ISSN :
Pending
Print_ISBN :
978-1-4577-0157-3
Type :
conf
DOI :
10.1109/TRANSDUCERS.2011.5969873
Filename :
5969873
Link To Document :
بازگشت