Title :
Microball bearing technology for MEMS devices and integrated microsystems
Author :
Ghodssi, R. ; Hanrahan, B. ; Beyaz, M.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Maryland, College Park, MD, USA
Abstract :
This paper presents a comprehensive review of microball bearing technology over the past eleven years. The design considerations and performance results of devices utilizing this type of microfabricated bearings are presented. Investigations on bearing tribology are also reported, specifically discussing the adhesion-dominated friction and wear regimes observed in rotary micromachines. As microsystem engineering progresses towards more heterogeneous and hybrid structures, microball bearing technology is expected to have a pivotal impact in broad transducing and packaging applications.
Keywords :
adhesion; ball bearings; design engineering; friction; micromachining; micromechanical devices; wear; MEMS device; adhesion-dominated friction; bearing tribology; design consideration; heterogeneous structure; hybrid structure; integrated microsystem; microball bearing technology; microfabricated bearing; microsystem engineering; packaging application; rotary micromachine; Ball bearings; Fabrication; Friction; Micromotors; Rotors; Silicon; Microball bearing; Microsystems; Tribology;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969887
