• DocumentCode
    2541764
  • Title

    Image analysis methods for solder ball inspection in integrated circuit manufacturing

  • Author

    Blanz, W.E. ; Sanz, J. L C ; Hinkle, E.B.

  • Author_Institution
    IBM Almaden Research Center, San Jose, CA, USA
  • Volume
    4
  • fYear
    1987
  • fDate
    31837
  • Firstpage
    509
  • Lastpage
    514
  • Abstract
    We address the problem of segmenting and analyzing images of solder balls in integrated circuits. Two methods are explored, one based on projections computed along curved contours derived from the geometry of the problem, and the other using a supervised, feature-based polynomial classification method. High accuracy is required for the machine vision solution to be successful, and we have included some considerations concerning sub-pixel accuracy for the computation of the values of parameters determining the two-dimensional solder ball shapes. The classification technique has performed with satisfactory results on available data.
  • Keywords
    Ceramics; Computational geometry; Image analysis; Image segmentation; Inspection; Integrated circuit manufacture; Packaging; Pixel; Polynomials; Shape;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Robotics and Automation. Proceedings. 1987 IEEE International Conference on
  • Type

    conf

  • DOI
    10.1109/ROBOT.1987.1087990
  • Filename
    1087990