Title :
Fabrication and characterization of uniform conformal thin films of SiO2 and SiNx on optical fibers
Author :
Green, M. ; Naqvi, Z. ; Smith, K. ; Tsing-Hua Her
Author_Institution :
Dept. of Phys. & Opt. Sci., UNC Charlotte, Charlotte, NC, USA
Abstract :
This paper reports the fabrication and characterization of uniform conformal dielectric thin films on optical fibers using plasma-enhanced chemical vapor deposition. We show convincingly that, using both iridescence and scanning electron microscopy, uniform deposition on the fiber can only be obtained if it is rotated at a constant speed during deposition. Our study is important for depositing single or multiple uniform dielectric thin films on objects with cylindrical or spherical symmetry, which could enable new optical functionalities.
Keywords :
dielectric thin films; infrared spectra; optical fibres; plasma CVD; scanning electron microscopy; silicon compounds; visible spectra; SiNx; SiO2; cylindrical symmetry; iridescence; optical fibers; optical functionalities; plasma-enhanced chemical vapor deposition; scanning electron microscopy; spherical symmetry; uniform conformal dielectric thin films; uniform conformal thin films; uniform deposition; Integrated optics; Optical fiber polarization; Optical fiber testing; Optical films; Optical polarization; Optical Fibers; Photonic Crystals; Thin Films;
Conference_Titel :
High-capacity Optical Networks and Emerging/Enabling Technologies (HONET), 2014 11th Annual
Conference_Location :
Charlotte, NC
Print_ISBN :
978-1-4799-6939-5
DOI :
10.1109/HONET.2014.7029398