Hybrid microassembly of chips on low precision patterns assisted by capillary self-alignment

This paper discusses capillary self-alignment assisted hybrid microassembly of chips on low precision patterns, in both the precision of the dimension and the precision of the edge smoothness. Special segmented patterns having jagged edges have been purposely designed and fabricated to mimic some real-world RFID antennas. Experimental tests have been carried out to investigate influence of the dimension and the edge jaggedness on the yield and accuracy of the self-alignment, using 730 ?? 730 ?? 70 ??m RFID chips as the test samples. The results show that the self-alignment occurs reliably with releasing bias less than 300 ??m in both horizontal axes, despite the variation in size of the segmented pattern and edge jaggedness. However, both the dimension and the edge jaggedness affect the alignment accuracy.