DocumentCode
2545761
Title
System Design And Operation Of A 100 Kilovolt, 2 Kilohertz Pulse Modulator For Plasma Source Ion Implantation
Author
Reass, William A.
Author_Institution
Los Alamos National Laboratory
fYear
1994
fDate
27-30 Jun 1994
Firstpage
5
Lastpage
8
Keywords
Automotive components; Circuit testing; Impedance; Implants; Ion implantation; Plasma immersion ion implantation; Plasma materials processing; Plasma sheaths; Plasma sources; Pulse modulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Modulator Symposium, 1994., Twenty-First International
ISSN
1076-8467
Type
conf
DOI
10.1109/MODSYM.1994.597027
Filename
597027
Link To Document