DocumentCode
2545776
Title
Initial Design Of A 1 Megawatt Average, 150 Kilovolt Pulse Modulator For An Industrial Plasma Source Ion Implantation Processor
Author
Reass, William A. ; Deb, Dipten
Author_Institution
Los Alamos National Lab
fYear
1994
fDate
27-30 Jun 1994
Firstpage
9
Lastpage
12
Keywords
Manufacturing; Oil insulation; Optical fiber cables; Plasma accelerators; Plasma chemistry; Plasma density; Plasma sources; Pulse modulation; Surface resistance; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Modulator Symposium, 1994., Twenty-First International
ISSN
1076-8467
Type
conf
DOI
10.1109/MODSYM.1994.597028
Filename
597028
Link To Document