DocumentCode :
2545791
Title :
Crossatron Modulator Designs And Performance For Plasma-based Ion Implantation Systems
Author :
Goebel, Dan M. ; Reass, William A.
Author_Institution :
Hughes Research Laboratories
fYear :
1994
fDate :
27-30 Jun 1994
Firstpage :
13
Lastpage :
16
Keywords :
Anodes; Apertures; Cathodes; Ion implantation; Plasma density; Plasma immersion ion implantation; Plasma materials processing; Plasma sheaths; Pulse modulation; Switches;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Power Modulator Symposium, 1994., Twenty-First International
ISSN :
1076-8467
Type :
conf
DOI :
10.1109/MODSYM.1994.597029
Filename :
597029
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2545791
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