Thin films for electrochemical sensoric interfaces

Author

Jakubec, A. ; Rehacek, V. ; Novotny, I. ; Ivanic, R. ; Tvarozek, V. ; Knedlik, Ch ; Breternitz, V. ; Spiess, L.

Author_Institution

Dept. of Microelectron., Slovak Tech. Univ., Bratislava, Slovakia

fYear

2002

fDate

14-16 Oct. 2002

Firstpage

321

Lastpage

324

Abstract

Planar microelectrochemical chips with thin-film electrodes (Au, Pt, Ag/AgCl) of different shapes and arrangements (compact, interdigitated array) on Si or glass substrates have been developed and fabricated Analyses of thin film roughness and surface morphology, by AFM and cyclic voltammetry have been performed. Resulting from this we found an optimal cleaning procedure of microelectrodes. The control and analysis of biosensing interfaces play a significant role in the design of biosensors and in optimization of their properties.

Keywords

atomic force microscopy; biosensors; electrochemical electrodes; electrochemical sensors; gold; metallic thin films; microelectrodes; microsensors; platinum; silver; silver compounds; surface cleaning; surface morphology; surface topography; voltammetry (chemical analysis); AFM; Ag-AgCl; Au; Pt; Si; biosensing interfaces; biosensors; cleaning procedure; cyclic voltammetry; electrochemical sensoric interfaces; glass substrates; interdigitated array; microelectrodes; optimization; planar microelectrochemical chips; surface morphology; thin film roughness; thin films; thin-film electrodes; Biosensors; Electrodes; Glass; Gold; Performance analysis; Rough surfaces; Semiconductor thin films; Shape; Substrates; Thin film sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on

Print_ISBN

0-7803-7276-X

Type

conf

DOI

10.1109/ASDAM.2002.1088533

Filename

1088533