DocumentCode
2550335
Title
Macromodeling of fluidic damping effects in microdevices
Author
Wachutka, Gerhard ; Schrag, Gahriele ; Sattler, Robert
Author_Institution
Inst. for Phys. of Electrotechnol., Munich Univ. of Technol., Germany
fYear
2002
fDate
14-16 Oct. 2002
Firstpage
329
Lastpage
332
Abstract
The operation of many mechatronical microdevices is significantly affected by viscous fluid damping effects. We present a methodology how these effects can be properly included in physically based microdevice and full system models for the effort-economizing and yet accurate predictive simulation of the operation of micro-mechatronical systems. The usability and quality of the approach is demonstrated by computational results for highly perforated microdevices.
Keywords
computational fluid dynamics; damping; flow simulation; microfluidics; micromechanical devices; fluidic damping effects; full system models; highly perforated microdevices; macromodeling; mechatronical microdevices; microdevices; micromechatronical systems; physically based microdevice models; viscous fluid damping; Computational modeling; Computer simulation; Damping; Geometry; Hardware design languages; Microstructure; Neutron spin echo; Predictive models; Process design; Solid modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on
Print_ISBN
0-7803-7276-X
Type
conf
DOI
10.1109/ASDAM.2002.1088536
Filename
1088536
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