Title :
Micromachining for optoelectronic systems
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
We review the current state of the art of micromachining in optoelectronic systems, and discuss in detail the progress of the free-space micro-optical bench (FSMOB) project at UCLA. The FSMOB comprises passive optical elements (diffractive and refractive lenses, gratings, beamsplitters, filters, etc.), micropositioners (translation and rotation stages), and microactuators. Because the micro-optical elements on the FSMOB are precisely positioned by photolithography, they can be "pre-aligned" during the photomask layout. The fabrication of the out-of-plane optical elements are compatible with the micromotors and other microactuators. Therefore, the optical elements can be monolithically integrated with micropositioners and microactuators for optical switching or scanning, or to achieve fine optical alignment.
Keywords :
diffraction gratings; integrated optics; integrated optoelectronics; lenses; microactuators; micromachining; micromotors; optical elements; optical filters; optical switches; photolithography; FSMOB; beamsplitters; diffractive lenses; fabrication; filters; fine optical alignment; free-space micro-optical bench project; gratings; micro-optical elements; microactuator; micromachining; micromotors; micropositioners; monolithic integration; optical scanning; optical switching; optoelectronic systems; out-of-plane optical elements; passive optical elements; photolithography; photomask layout; refractive lenses; rotation stages; translation stages; Diffraction gratings; Integrated optics; Lenses; Lithography; Microactuators; Micromachining; Optical diffraction; Optical filters; Optical refraction; Passive filters;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1996. LEOS 96., IEEE
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-3160-5
DOI :
10.1109/LEOS.1996.571615
