DocumentCode
2552564
Title
Design and test of MEMS
Author
Courtois, B. ; Karam, J.M. ; Mir, S. ; Lubaszewski, M. ; Székely, V. ; Rencz, M. ; Hofmann, K. ; Glesner, M.
Author_Institution
TIMA Lab., Grenoble, France
fYear
1999
fDate
7-10 Jan 1999
Firstpage
270
Lastpage
275
Abstract
This paper deals with design, simulation and test of MEMS (microelectromechanical systems). Both existing tools and open research areas are addressed. An appropriate Computer-Aided Design (CAD) environment is presented. Similarities between the present development of MEMS and the development of microelectronics decades ago are pointed out, including the migration from point tools to CAD frameworks, testing and intellectual property (IP) issues
Keywords
industrial property; micromechanical devices; semiconductor device testing; technology CAD (electronics); CAD environment; CAD frameworks; MEMS; intellectual property; microelectromechanical systems; open research areas; testing; Circuit testing; Design automation; Mechanical systems; Microelectromechanical systems; Microelectronics; Micromechanical devices; Productivity; Read only memory; Rivers; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Design, 1999. Proceedings. Twelfth International Conference On
Conference_Location
Goa
ISSN
1063-9667
Print_ISBN
0-7695-0013-7
Type
conf
DOI
10.1109/ICVD.1999.745160
Filename
745160
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