Planar motion stage control using PDFF controller

For the improvement of the precision engineering, a precision motion is one of the key issues. The goal of this paper is to establish a precision stage. Four linear motors are used to establish a noncontact table to avoid the influence of friction, and a two-dimensional planar encoder is employed as feedback sensors. In order to accomplish ultra precision motion, a PDFF (pseudo derivative feedback with feed-forward) controller is used. Compared with normal PI controller, simulation results show that the PDFF controller can perform better than PI controller not only in running a step motion but also in running a dynamic trajectory.