DocumentCode :
2552948
Title :
Performance models for dual-arm cluster tools
Author :
Park, Kyungsu ; Ahn, Younghun ; Morrison, James R.
Author_Institution :
Dept. of Ind. & Syst. Eng., KAIST, Daejeon, South Korea
fYear :
2011
fDate :
21-25 June 2011
Firstpage :
816
Lastpage :
821
Abstract :
Cluster tools with a dual-arm wafer transport robot are common in semiconductor wafer manufacturing. However, existing modeling methods suffer either from computational complexity (e.g., Petri nets, detailed simulation) and the resulting dearth of insight or from simplicity and its attendant loss of accuracy and expression (e.g., Ax+B models). Looking toward application in tool configuration optimization, performance evaluation and fab-wide simulation models, we develop expressive and computationally tractable equations and recursions for the cycle time of such cluster tools. The models include transient periods and robot behavior to express nonlinearities in tool performance. The models incorporate the affinity of such tools toward lots with certain numbers of wafers. We conduct simulations of dual-arm cluster tools to assess the quality of our models and compare performance and computational complexity between various approximation methods.
Keywords :
approximation theory; cluster tools; control nonlinearities; industrial robots; optimisation; performance evaluation; robot kinematics; semiconductor device manufacture; approximation methods; computational complexity; dual-arm cluster tools; fab wide simulation models; nonlinearities; performance evaluation; recursions; semiconductor wafer manufacturing; tool configuration optimization; wafer transport robot; Approximation methods; Computational modeling; Mathematical model; Robots; Semiconductor device modeling; Throughput; Cluster tools; cycle time; dual-arm robot; fab-wide simulation; nonlinearity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Intelligent Control and Automation (WCICA), 2011 9th World Congress on
Conference_Location :
Taipei
Print_ISBN :
978-1-61284-698-9
Type :
conf
DOI :
10.1109/WCICA.2011.5970628
Filename :
5970628
Link To Document :
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